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Keyword:silicic probe

Publications
Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage
Maksym Bondarenko, Victor Antonyuk, Iuliia Bondarenko, Iryna Makarenko and Sergii Vysloukh
EasyChair Preprint 4970
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