Keyword:silicic probe

Papers
Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage Maksym Bondarenko, Victor Antonyuk, Iuliia Bondarenko, Iryna Makarenko and Sergii Vysloukh EasyChair Preprint no. 4970